Sökning: onr:"swepub:oai:DiVA.org:miun-1556" > Buried Cobalt Silic...
Fältnamn | Indikatorer | Metadata |
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000 | 02642naa a2200385 4500 | |
001 | oai:DiVA.org:miun-1556 | |
003 | SwePub | |
008 | 081211s1994 | |||||||||||000 ||eng| | |
024 | 7 | a https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-15562 URI |
024 | 7 | a https://doi.org/10.1149/1.20592392 DOI |
040 | a (SwePub)miun | |
041 | a engb eng | |
042 | 9 SwePub | |
072 | 7 | a ref2 swepub-contenttype |
072 | 7 | a art2 swepub-publicationtype |
100 | 1 | a Ljungberg, K.4 aut |
245 | 1 0 | a Buried Cobalt Silicide Layers in Silicon Created by Wafer Bonding |
264 | c 2019-12-07 | |
264 | 1 | b The Electrochemical Society,c 1994 |
338 | a print2 rdacarrier | |
520 | a A buried conductive layer in silicon has been created using wafer bonding technique, with a cobalt interfacial layer.Co-coated silicon wafers were brought into contact with either similar or uncoated wafers at room temperature. CoSi2 wasthen formed through a solid-phase reaction, during an anneal at 700 to 900°C. A 700 Å buried CoSi2-layer, with a resistivityof approximately 21 µ cm, was achieved. Good adhesion, as measured by tensile strength testing, between the wafers wasachieved. Transmission electron microscopic investigations (Co-coated wafer bonded to bare silicon) showed that thesilicide has not grown into the opposite wafer, and that an amorphous layer exists between the silicide and the siliconsurface. The presence of such a layer has been confirmed by electrical characterization. | |
650 | 7 | a TEKNIK OCH TEKNOLOGIERx Elektroteknik och elektronik0 (SwePub)2022 hsv//swe |
650 | 7 | a ENGINEERING AND TECHNOLOGYx Electrical Engineering, Electronic Engineering, Information Engineering0 (SwePub)2022 hsv//eng |
653 | a Wafer bonding cobalt disilicide | |
653 | a Electrical engineering, electronics and photonics | |
653 | a Elektroteknik, elektronik och fotonik | |
700 | 1 | a Söderberg, A.4 aut |
700 | 1 | a Tiensuu, A-L4 aut |
700 | 1 | a Johansson, S.4 aut |
700 | 1 | a Thungström, Göranu Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)4 aut0 (Swepub:miun)gorthu |
700 | 1 | a Petersson, Stureu Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)4 aut0 (Swepub:miun)stupet |
710 | 2 | a Mittuniversitetetb Institutionen för informationsteknologi och medier (-2013)4 org |
773 | 0 | t Journal of the Electrochemical Societyd : The Electrochemical Societyg 141:10, s. 2829-2833q 141:10<2829-2833x 0013-4651x 1945-7111 |
856 | 4 8 | u https://urn.kb.se/resolve?urn=urn:nbn:se:miun:diva-1556 |
856 | 4 8 | u https://doi.org/10.1149/1.2059239 |
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