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Integration of an i...
Integration of an interferometric IR absorber into an epoxy membrane based CO2 detector
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- Ashraf, Shakeel, 1984- (författare)
- Mittuniversitetet,Avdelningen för elektronikkonstruktion,Detector and Photonics
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- Mattsson, Claes (författare)
- Mittuniversitetet,Avdelningen för elektronikkonstruktion,Detector and Photonics
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- Thungström, Göran (författare)
- Mittuniversitetet,Avdelningen för elektronikkonstruktion,Detector and Photonics
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- Rödjegard, Henrik (författare)
- SenseAir AB, Delsbo, Sweden
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(creator_code:org_t)
- 2014
- 2014
- Engelska.
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Ingår i: Journal of Instrumentation. - 1748-0221. ; 9:5, s. Art. no. C05035-
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Measurements of carbon dioxide levels in the environment are commonly performedby using non-dispersive infrared technology (NDIR). Thermopile detectors are often used in NDIRsystems because of their non-cooling advantages. The infrared absorber has a major influence onthe detector responsivity. In this paper, the fabrication of a SU-8 epoxy membrane based Al/Bithermopile detector and the integration of an interferometric infrared absorber structure of wavelength around 4 µ m into the detector is reported. The membrane of thermopile detector has beenutilized as a dielectric medium in an interferometric absorption structure. By doing so, a reduction in both thermal conductance and capacitance is achieved. In the fabrication of the thermopile,metal evaporation and lift off process had been used for the deposition of serially interconnectedAl/Bi thermocouples. Serial resistance of fabricated thermopile was measured as 220 kΩ. Theresponse of fabricated thermopile detector was measured using a visible to infrared source of radiation flux 3.23 mW mm−2. The radiation incident on the detector was limited using a band passfilter of wavelength 4.26 µ m in front of the detector. A responsivity of 27.86 V mm2W−1at roomtemperature was achieved using this setup. The fabricated detector was compared to a referencedetector with a broad band absorber. From the comparison it was concluded that the integratedinterferometric absorber is functioning correctly.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Detector modelling and simulations I (interaction of radiation with matter
- interaction of photons with matter
- interaction of hadrons with matter
- etc); Spectrometers
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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