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H2S gas sensing bas...
H2S gas sensing based on SnO2thin films deposited by ultrasonic spray pyrolysis on Al2O3substrate
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- Akbari-Saatlu, Mehdi (författare)
- Mittuniversitetet,Institutionen för elektronikkonstruktion
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- Procek, Marcin, 1987- (författare)
- Mittuniversitetet,Institutionen för elektronikkonstruktion,Silesian University of Technology, Poland
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- Thungström, Göran, 1960- (författare)
- Mittuniversitetet,Institutionen för elektronikkonstruktion
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- Mattsson, Claes, 1978- (författare)
- Mittuniversitetet,Institutionen för elektronikkonstruktion
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- Radamson, Henry H. (författare)
- Mittuniversitetet,Institutionen för elektronikkonstruktion,Institute of Microelectronics, Chinese Academy of Sciences, China; Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou, 510535, China
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(creator_code:org_t)
- 2021
- 2021
- Engelska.
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Ingår i: 2021 IEEE Sensors Applications Symposium (SAS). - 9781728194318
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- H2S gas is harmful for human health and environment, therefore novel gas sensors for real time and fast detection with high precision have been sought. Metal oxides are already known as promising candidate for this purpose. This article presents the performance of a gas sensor consists of a microheater and active layer formed on single alumina substrate for operating at high temperature applications. Ultrasonic spray pyrolysis deposition method was used to make both thick layer of SnO2 for microheater and thin and porous crystalline layer of SnO2 as sensing layer. The prepared sensor showed suitable dynamic response towards 10 to 50 ppm of H2S gas both in humid and dry conditions at 450 °C. In these experiments, the cross sensitivity of the sensor was also checked for other interfering gases e.g. CH4 and NO2.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- Gas sensor
- H2S
- Nanoporous thin film
- SnO2
- Ultrasonic spray pyrolysis
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)
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