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Simple method for q...
Simple method for quality factor estimation in resonating MEMS structures
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- Larsson, S. (författare)
- Linköping University, Sweden,RISE Acreo AB, Sweden
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- Johannisson, Pontus (författare)
- RISE,Acreo,RISE Acreo AB, Sweden
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- Kolev, D (författare)
- RISE,Acreo,RISE Acreo AB, Sweden
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- Ohlsson, F (författare)
- RISE,Acreo,RISE Acreo AB, Sweden
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- Nik, S. (författare)
- Silex Microsystems AB; IMEC, Belgium
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- Liljeholm, Jessica (författare)
- KTH,Mikro- och nanosystemteknik,Silex Microsystems AB; KTH, Sweden
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- Ebefors, T. (författare)
- Silex Microsystems AB; Spinverse AB, Sweden
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- Rusu, Cristina (författare)
- RISE,Acreo,RISE Acreo AB, Sweden
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(creator_code:org_t)
- 2018-07-26
- 2018
- Engelska.
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Ingår i: Proceedings of the 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, 2017. - : IOP Publishing.
- Relaterad länk:
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https://iopscience.i...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- The quality factor of a packaged MEMS resonating structure depends on both the packaging pressure and the structure's proximity to the walls. This type of mechanical constraints, which causes energy dissipation from the structure to the surrounding air, are applicable for oscillating energy harvesters and should be considered in the design process. However, the modelling of energy losses or the measurements of their direct influence inside a packaged chip is not trivial. In this paper, a simple experimental method to quantify the energy loss in an oscillating MEMS structures due to the surrounding air is described together with preliminary results. The main advantage of the method is the ability to characterize the damping contributions under different vacuum and packaging conditions without requiring any packaging of the harvester chip or fabrication of multiple devices with different cavity depths. © Published under licence by IOP Publishing Ltd.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Samhällsbyggnadsteknik -- Husbyggnad (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Civil Engineering -- Building Technologies (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Energy conversion
- Energy dissipation
- Nanotechnology
- Damping contribution
- Energy Harvester
- Experimental methods
- Mechanical constraints
- Multiple devices
- Quality factor estimation
- Quality factors
- Resonating structures
- Chip scale packages
Publikations- och innehållstyp
- ref (ämneskategori)
- kon (ämneskategori)
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