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Highly Mass-Sensiti...
Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
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- Arapan, Lilia (författare)
- Uppsala universitet,Fasta tillståndets elektronik,Thin Films
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- Alexieva, Gergana (författare)
- Dept of Solid State Physics and Microelectronics, University of Sofia, Bulgarien,Acoustics
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- Avramov, Ivan D (författare)
- Georgy nadjakov Institute of Solid State Physics, Sofia,Bulgarian Academy of Sciences,Acoustics
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- Radeva, Elisaveta (författare)
- Georgy Nadjakov Institute of Solid State Physics, Sofia, Bulgarian Academy of Sciences,acoustics
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- Strashilov, Vesseline (författare)
- University of Sofia,acoustics
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- Katardjiev, Ilia (författare)
- Uppsala universitet,Fasta tillståndets elektronik,Thin Films
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- Yantchev, Ventsislav (författare)
- Uppsala universitet,Fasta tillståndets elektronik,Thin films
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(creator_code:org_t)
- 2011-07-04
- 2011
- Engelska.
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Ingår i: Sensors. - : MDPI AG. - 1424-8220. ; 11:7, s. 6942-6953
- Relaterad länk:
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https://uu.diva-port... (primary) (Raw object)
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https://www.mdpi.com...
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https://urn.kb.se/re...
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https://doi.org/10.3...
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Abstract
Ämnesord
Stäng
- The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.
Nyckelord
- resonator
- aluminum nitride
- membrane
- HMDSO
- gravimetric
- sensitivity
- Other electrical engineering, electronics and photonics
- Övrig elektroteknik, elektronik och fotonik
- Teknisk fysik med inriktning mot mikrosystemteknik
- Engineering Science with specialization in Microsystems Technology
- Engineering Science with specialization in Electronics
- Teknisk fysik med inriktning mot elektronik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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