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Growth of Ti-C nano...
Growth of Ti-C nanocomposite films by reactive high power impulse magnetron sputtering under industrial conditions
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- Samuelsson, Mattias, 1976- (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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- Sarakinos, Kostas (författare)
- Linköpings universitet,Tekniska högskolan,Plasma och ytbeläggningsfysik
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- Högberg, Hans (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Lewin, Erik (författare)
- Uppsala universitet,Oorganisk kemi,Department of Materials Chemistry, The Ångström Laboratory, Uppsala University, Sweden
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- Jansson, Ulf (författare)
- Uppsala universitet,Oorganisk kemi,Department of Materials Chemistry, The Ångström Laboratory, Uppsala University, Sweden
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- Wälivaara, Bengt (författare)
- Impact Coatings AB, Westmansgatan 29, SE-582 16 Linköping, Sweden
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- Ljungcrantz, Henrik (författare)
- Impact Coatings AB, Westmansgatan 29, SE-582 16 Linköping, Sweden
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- Helmersson, Ulf (författare)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan
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(creator_code:org_t)
- Elsevier BV, 2012
- 2012
- Engelska.
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Ingår i: Surface & Coatings Technology. - : Elsevier BV. - 0257-8972 .- 1879-3347. ; 206:8-9, s. 2396-2402
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https://liu.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Titanium carbide (TiC) films were deposited employing high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS) in an Ar-C2H2 atmosphere of various compositions. Analysis of the structural, bonding and compositional characteristics revealed that the deposited films are either TiC and hydrogenated amorphous carbon (a-C:H) nanocomposites, nanocrystalline TiC, or Ti/Tic, depending on the C/Ti ratio. It was found that Ti-C films grown by HiPIMS show a C/Ti ratio of close to 1 for a wide C2H2 flow range (4-15 sccm), with free C ranging from 0 to 20%. Thus, films ranging from near stoichiometric single phase TiC to TiC/a-C:H nanocomposites can be synthesized. This was not the case for DCMS, where films grown using similar deposition rates as for HiPIMS formed larger fractions of amorphous C matrix, thus being nanocomposites in the same C2H2 (above 4 sccm) flow range. For a C/Ti ratio of 1 the resistivity is low (4-8 x 10(2) mu Omega cm) for the HiPIMS films, and high (>100x 10(2) mu Omega cm) for the DCMS films. The hardness also shows a big difference with 20-27 and 6-10 GPa for HiPIMS and DCMS grown films, respectively.
Nyckelord
- HiPIMS
- HPPMS
- Reactive magnetron sputtering
- TiC
- a-C:H Nanocomposite
- NATURAL SCIENCES
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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