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Controllable growth...
Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors
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- Nguyen, Hugo, 1955- (författare)
- Uppsala universitet,Mikrosystemteknik
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- Quy, Chu Thi (författare)
- Hanoi University of Science and Technology,International Training Institute for Materials Science
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- Hoa, Nguyen Duc (författare)
- Hanoi University of Science and Technology,International Training Institute for Materials Science
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- Lam, Nguyen The (författare)
- Hanoi Pedagogical University No 2, Vinhphuc, Viet Nam,Faculty of Physics
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- Duy, Nguyen Van (författare)
- Hanoi University of Science and Technology,International Training Institute for Materials Science
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- Quang, Vu Van (författare)
- Hanoi University of Science and Technology,International Training Institute for Materials Science
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- Hieu, Nguyen Van (författare)
- Hanoi University of Science and Technology,International Training Institute for Materials Science
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(creator_code:org_t)
- Elsevier BV, 2014
- 2014
- Engelska.
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Ingår i: Sensors and actuators. B, Chemical. - : Elsevier BV. - 0925-4005 .- 1873-3077. ; 193, s. 888-894
- Relaterad länk:
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https://uu.diva-port... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The proper engineering design of gas sensors and the controlled synthesis of sensing materials for the high-performance detection of toxic gas are very important in the fabrication of handheld devices. In this study, an effective design for gas sensor chips is developed to control the formation of grown ZnO nanowires (NWs).The design utilizes the dendrite islands of Au catalyst deposited on and between Pt electrodes of a planar-type micro gas sensor so that NWs can grow on instead of a continuous Au seed layer. This method results in an increase of NW-NW junctions on the device and also eliminates current leakage through the seed layer, which results in a higher sensitivity. The results show that the developed gas-sensing devices could be used to monitor NO2 at moderate temperature (~250 °C) and/or ethanol at a high temperature (~400 °C).
Nyckelord
- ZnO nanowires
- on-chip growth
- MEMS
- planar-type sensors
- Teknisk fysik med inriktning mot mikrosystemteknik
- Engineering Science with specialization in Microsystems Technology
- Engineering Science with specialization in Materials Science
- Teknisk fysik med inriktning mot materialvetenskap
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