Thermomechanical stability and integrability of an embedded ceramic antenna with an integrated sensor element for wireless reading in harsh environments

Sturesson, Peter,1981-Försvarshögskolan,Uppsala universitet,Mikrosystemteknik,Försvarshögskolan/Swedish National Defence College,ÅSTC,Militärtekniska avdelningen (MTA),Uppsala University,Ångström Space Technology Centre (författare)

This paper reports on the design, manufacturing and evaluation of a small, wirelessly powered and read resonating antenna circuit with an integrated pressure sensor. The work aims at developing miniature devices suitable for harsh environments, where high temperature prevents the use of conventional, silicon-based microdevices. Here, the device is made of alumina with platinum as conducting material. Ceramic green tapes were structured using high-precision milling, metallized using screen printing, and subsequently laminated to form stacks before they were sintered. The device's frequency shift as a function of temperature was studied up to 900°C. The contributions to the shift both from the thermomechanical deformation of the device at large, and from the integrated and, so far, self-pressurized sensor were sorted out. A total frequency shift of 3200 ppm was observed for the pressure sensor for heating over the whole range. Negligible levels of thermally induced radius of curvature were observed. With three-point bending, a frequency shift of 180 ppm was possible to induce with a curvature of radius of 220 m at a 10 N load. The results indicate that a robust pressure sensor node, which can register pressure changes of a few bars at 900°C and wirelessly transmit the signal, is viable.

TEKNIK OCH TEKNOLOGIER Materialteknik Keramteknik hsv//swe
ENGINEERING AND TECHNOLOGY Materials Engineering Ceramics hsv//eng
TEKNIK OCH TEKNOLOGIER Maskinteknik Rymd- och flygteknik hsv//swe
ENGINEERING AND TECHNOLOGY Mechanical Engineering Aerospace Engineering hsv//eng
Wireless pressure sensor
harsh environment
high temperature
ceramic embedding
Teknisk fysik med inriktning mot mikrosystemteknik
Engineering Science with specialization in Microsystems Technology
Försvarssystem

Khaji, Zahra AtenaUppsala universitet,Mikrosystemteknik,Uppsala University,Microsystems Division(Swepub:uu)zahka339 (författare)
Knaust, StefanUppsala universitet,Mikrosystemteknik,Uppsala University,Microsystems Division(Swepub:uu)stesv734 (författare)
Sundqvist, JohanUppsala universitet,Mikrosystemteknik,ÅSTC,Uppsala University,Ångström Space Technology Centre(Swepub:uu)johsu151 (författare)
Klintberg, LenaUppsala universitet,Mikrosystemteknik,Uppsala University,Microsystems Division(Swepub:uu)lkl28025 (författare)
Thornell, GregerUppsala universitet,Mikrosystemteknik,ÅSTC,Uppsala University,Ångström Space Technology Centre(Swepub:uu)gth12095 (författare)
Uppsala universitetMikrosystemteknik (creator_code:org_t)

Ingår i:Journal of Physics: Conference SeriesLondon : IOP Publishing1742-65881742-6596
Ingår i:Journal of PhysicsLondon : IOP Publishing

Av författaren/redakt...: Sturesson, Peter ...; Khaji, Zahra Ate ...; Knaust, Stefan; Sundqvist, Johan; Klintberg, Lena; Thornell, Greger

Om ämnet

TEKNIK OCH TEKNOLOGIER: TEKNIK OCH TEKNO ...; och Materialteknik; och Keramteknik

TEKNIK OCH TEKNOLOGIER: TEKNIK OCH TEKNO ...; och Maskinteknik; och Rymd och flygtek ...

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