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Deposition and char...
Deposition and characterization of reactive magnetron sputtered zirconium carbide films
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- Meng, Qingnan N. (författare)
- Uppsala universitet,Oorganisk kemi
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Wen, M. (författare)
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- Mao, Fang (författare)
- Uppsala universitet,Oorganisk kemi
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- Nedfors, Nils (författare)
- Uppsala universitet,Oorganisk kemi
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- Jansson, Ulf (författare)
- Uppsala universitet,Oorganisk kemi
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Zheng, W. T. (författare)
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(creator_code:org_t)
- Elsevier BV, 2013
- 2013
- Engelska.
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Ingår i: Surface & Coatings Technology. - : Elsevier BV. - 0257-8972 .- 1879-3347. ; 232, s. 876-883
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Zirconium carbide films have been deposited on silicon (100) substrates using direct current magnetron reactive sputtering using CH4 as a carbon source. The films exhibit a typical nanocomposite structure consisting of nanocrystalline ZrCx (nc-ZrC) grains embedded in a matrix of amorphous carbon (a-C) at low carbon content. Almost no crystalline phase can be found for carbon contents above 86 at.%. The mechanical, tribological and electrical properties of the films showed a significant dependency on the amount of the a-C in the nanocomposite structure. A larger amount of a-C gives rise to reduced hardness and higher resistivity of the film. However, both friction coefficient and wear resistance are improved by increasing the content of the surplus a-C. The influence of binding state of excess a-C phase on the properties has also been investigated. A larger sp(2)/sp(3) ratio was beneficial to relax the stress and improve the electrical properties. The Zr-based films exhibited lower friction coefficients than nanocomposites films based on e.g. Ti suggesting a potential application for this material in sliding contacts.
Nyckelord
- Zirconium carbide
- Mechanical properties
- Friction and wear
- Electrical resistivity
- Magnetron sputtering
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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