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Monolithic integrat...
Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers
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- Karlsson, Mikael (författare)
- Uppsala universitet,Materialvetenskap
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- Nikolajeff, Fredrik (författare)
- Uppsala universitet,Materialvetenskap
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- Vukusic, J (författare)
- Chalmers University of Technology, Sweden
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- Martinsson, H (författare)
- Chalmers University of Technology, Sweden
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- Bengtsson, J (författare)
- Chalmers University of Technology, Sweden
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- Larsson, A (författare)
- Chalmers University of Technology, Sweden
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(creator_code:org_t)
- 2003
- 2003
- Engelska.
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Ingår i: IEEE Photonics Technology Letters. - 1041-1135 .- 1941-0174. ; 15:3, s. 359-361
- Relaterad länk:
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http://ieeexplore.ie...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- In this work, we have studied the transfer of diffractive optical elements (DOEs), originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting lasers (VCSELs). The DOEs are blazed gratings and Fresnel lenses, and have been fabricated on the back surface of bottom emitting VCSELs using electron-beam lithography or replication by hot embossing in resist followed by a quick-dry etch step. Diffraction efficiency was measured to be 81% in the first order of diffraction for the blazed grating.
Ämnesord
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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