Micromachining by ion track lithography

• Micromachining by ion track etching (MITE) based on the lithographic projection of a mask onto an arbitrary ion track recording material using a parallel beam of highly energetic heavy ions, is described here. By this, deep microstructures have been produ

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Materialteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Materials Engineering (hsv//eng)

Nyckelord

micromachining; lithography; etching

Materials science

Teknisk materialvetenskap

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