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Multi-component (Al...
Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
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- von Fieant, Kristina (författare)
- Uppsala universitet,Oorganisk kemi
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- Paschalidou, Eirini-Maria (författare)
- Uppsala universitet,Oorganisk kemi
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- Srinath, Aishwarya (författare)
- Uppsala universitet,Oorganisk kemi
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- Soucek, Pavel (författare)
- Masaryk Univ, Dept Phys Elect, Brno, Czech Republic
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- Riekehr, Lars (författare)
- Uppsala universitet,Oorganisk kemi
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- Nyholm, Leif, 1961- (författare)
- Uppsala universitet,Oorganisk kemi
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- Lewin, Erik, Dr. 1979- (författare)
- Uppsala universitet,Oorganisk kemi
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(creator_code:org_t)
- Elsevier BV, 2020
- 2020
- Engelska.
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Ingår i: Thin Solid Films. - : Elsevier BV. - 0040-6090 .- 1879-2731. ; 693
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Multi-component nitride thin films in the Al-Cr-Nb-Y-Zr system with non-equimolar composition have been deposited by reactive dc magnetron sputtering. The substrate temperature and substrate bias have been varied, from room temperature to 700 degrees C and from 0 to -200 V respectively. The relationship between these varied growth conditions on the structure, morphology, mechanical and corrosion properties of the films have been probed. All films consisted of a single solid solution with a NaCl-type structure, as shown by X-ray diffraction. However, elemental energy dispersive spectroscopy maps, obtained in the scanning transmission electron microscope, indicated that there could be partial segregation of Al, Cr and Y atoms within the grains. The microstructure of the films became denser, more fine-grained and smoother as the bias and temperature were increased. Nanoindentation showed that the hardness of the films increased with both bias and temperature, reaching a maximum of 27 +/- 2 GPa. The corrosion resistance of the films, studied by performing potentiodynamic polarisation curves in 1 M HCl, was also found to be improved when compared to a commercially available hyper-duplex stainless steel and a ternary reference (Nb,Zr)N thin film as well.
Ämnesord
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
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