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A comparison of the...
A comparison of thermally and photochemically cross-linked polymers for nanoimprinting
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Pfeiffer, K (författare)
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Reuther, F (författare)
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Fink, M (författare)
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Gruetzner, G (författare)
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- Carlberg, Patrick (författare)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Maximov, Ivan (författare)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Montelius, Lars (författare)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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Seekamp, J (författare)
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Zankovych, S (författare)
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Sotomayor-Torres, C M (författare)
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Schulz, H (författare)
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Scheer, H C (författare)
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(creator_code:org_t)
- 2003
- 2003
- Engelska.
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Ingår i: Microelectronic Engineering. - 1873-5568. ; 67-8, s. 266-273
- Relaterad länk:
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http://dx.doi.org/10...
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https://lup.lub.lu.s...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The characteristics and benefits of two types of cross-linking prepolymers with low glass transition temperature (T-g) for nanoimprinting are reported. They are soluble in organic solvents and their solutions can be processed like those of common thermoplastics. The imprinted patterns receive high thermal and mechanical stability through cross-linking polymerization. The course of the polymerization was investigated to determine the appropriate conditions for the imprint process. In thermally cross-linked polymers mr-I 9000, the cross-linking occurs during imprinting. Process time and temperature depend on the polymerization rate. Volume shrinkage during the polymerization does not adversely affect imprinting. Photochemically cross-linked polymers mr-L 6000 make possible imprint temperatures below 100 T and short imprint times. The T-g of the prepolymer determines the imprint temperature. The cross-linking reaction and structural stabilization is performed after imprinting. 50-nm trenches and sub-50-nm dots confirm the successful application of the polymers.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- resist
- nanoimprint lithography
- chemically amplified
- cross-linked polymers
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Till lärosätets databas
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Pfeiffer, K
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Reuther, F
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Fink, M
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Gruetzner, G
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Carlberg, Patric ...
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Maximov, Ivan
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visa fler...
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Montelius, Lars
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Seekamp, J
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Zankovych, S
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Sotomayor-Torres ...
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Schulz, H
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Scheer, H C
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visa färre...
- Om ämnet
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- NATURVETENSKAP
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NATURVETENSKAP
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och Fysik
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och Den kondenserade ...
- Artiklar i publikationen
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Microelectronic ...
- Av lärosätet
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Lunds universitet