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Threshold stoichiom...
Threshold stoichiometry for beam induced nitrogen depletion of SiN
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Timmers, H (författare)
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Weijers, TDM (författare)
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Elliman, RG (författare)
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Uribasterra, J (författare)
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- Whitlow, Harry J (författare)
- Lund University,Lunds universitet,Kärnfysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Nuclear physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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- Sarwe, Eva-Lena (författare)
- Lund University,Lunds universitet,Fasta tillståndets fysik,Fysiska institutionen,Institutioner vid LTH,Lunds Tekniska Högskola,Solid State Physics,Department of Physics,Departments at LTH,Faculty of Engineering, LTH
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(creator_code:org_t)
- 2002
- 2002
- Engelska.
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Ingår i: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms. - 0168-583X. ; 190, s. 428-432
- Relaterad länk:
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http://dx.doi.org/10...
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https://lup.lub.lu.s...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Measurements of the stoichiometry of silicon nitride films as a function of the number of incident ions using heavy ion elastic recoil detection (ERD) show that beam-induced nitrogen depletion depends on the projectile species. the beam energy, and the initial stoichiometry. A threshold stoichiometry exists in the range 1.3 > N/Si greater than or equal to 1, below which the films are stable against nitrogen depletion. Above this threshold, depletion is essentially linear with incident fluence. The depletion rate correlates non-linearly with the electronic energy loss of the projectile ion in the film. Sufficiently long exposure of nitrogen-rich films renders the mechanism, which prevents depletion of nitrogen-poor films, ineffective. Compromising depth-resolution. nitrogen depletion from SiN films during ERD analysis can be reduced significantly by using projectile beams with low atomic numbers. (C) 2002 Published by Elsevier Science B.V.
Ämnesord
- NATURVETENSKAP -- Fysik -- Subatomär fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Subatomic Physics (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- nitrogen depletion
- ion beam analysis
- elastic recoil detection
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- ref (ämneskategori)
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