Sökning: onr:"swepub:oai:research.chalmers.se:7919f1bc-2819-4a07-9e00-a198c978600c" >
Impact of O2 flow r...
Impact of O2 flow rate on the growth rate of ZnO(0001) and ZnO(000-1) on GaN by plasma-assisted molecular beam epitaxy
-
- Adolph, David, 1971 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Ive, Tommy, 1968 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
(creator_code:org_t)
- 2016-03-16
- 2016
- Engelska.
-
Ingår i: Physica Status Solidi (B): Basic Research. - : Wiley. - 1521-3951 .- 0370-1972. ; 253:8, s. 1523-1528
- Relaterad länk:
-
http://dx.doi.org/10...
-
visa fler...
-
https://research.cha...
-
https://doi.org/10.1...
-
visa färre...
Abstract
Ämnesord
Stäng
- We studied the effects of a varying O$ flow rate on the growth of ZnO(0001) and ZnO(000-1) layers on GaN/Al2O3-templates by plasma-assisted molecular beam epitaxy. The O2 flow rate through the O-plasma source was varied between 0.25--4.5 standard cubic centimeters per minute corresponding to a growth chamber pressure between 3.0 x 10^-6 -- 5.0x10^-5 Torr. We found that the change of the O2 flow rate had a profound effect on the ZnO layer growth rate. A maximum growth rate was reached for an O2 flow rate of 1.0--2.0 standard cubic centimeters per minute. The same growth rate dependence on the O2 flow rate was observed for ZnO(0001) layers that were grown on GaN/4H-SiC buffer layers for verification. To assess the amount of active O contributing to the ZnO-growth, the spectral composition of the plasma was investigated with optical emission spectroscopy. The integrated optical emission line intensity reached a maximum for an O2 flow rate between 1.0--2.0 standard cubic centimeters per minute. Essentially all emission lines exhibited a maximum intensity for an O2 flow rate between 1.0--2.0 standard cubic centimeters per minute thus coinciding with the flow rate yielding the maximum growth rate.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- plasma
- MBE
- Oxygen
- ZnO
Publikations- och innehållstyp
- art (ämneskategori)
- ref (ämneskategori)
Hitta via bibliotek
Till lärosätets databas