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Evaluation of an In...
Evaluation of an InAlN/AlN/GaN HEMT with Ta-based ohmic contacts and PECVD SiN passivation
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- Malmros, Anna, 1977 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Gamarra, P. (författare)
- Thales Group
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- Thorsell, Mattias, 1982 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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visa fler...
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- di Forte-Poisson, M. A. (författare)
- Thales Group
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- Lacam, C. (författare)
- Thales Group
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- Tordjman, M. (författare)
- Thales Group
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- Aubry, R. (författare)
- Thales Group
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- Zirath, Herbert, 1955 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Rorsman, Niklas, 1964 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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visa färre...
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(creator_code:org_t)
- 2014-01-22
- 2014
- Engelska.
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Ingår i: Physica Status Solidi (C) Current Topics in Solid State Physics. - : Wiley. - 1610-1642 .- 1862-6351. ; 11:3-4, s. 924-927
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Abstract
Ämnesord
Stäng
- An InAlN/AlN/GaN HEMT with Au-free Ta-based ohmic contacts and a high-quality PECVD SiN passivation is reported. The ohmic contacts were annealed at 550 degrees C, resulting in a contact resistance of 0.64 Omm. The gate length was 50 nm. The device performance and the process were evaluated by performing DC-, pulsed IV-, RF-, and load-pull measurements. It was observed that current slump was effectively mitigated by the passivation layer. The DC channel current density increased by 71 % to 1170 mA/mm at the knee of the IV curve, and the transconductance increased from 382 to 477 mS/mm after passivation. At the same time the gate leakage increased, and the extrinsic f(max) decreased from 207 to 140 GHz. Output powers of 4.1 and 3.5 W/mm were measured after passivation at 31 and 40 GHz, respectively.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- Ta
- passivation
- InAlN
- HEMT
- ohmic contact
Publikations- och innehållstyp
- art (ämneskategori)
- ref (ämneskategori)
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Malmros, Anna, 1 ...
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Gamarra, P.
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Thorsell, Mattia ...
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di Forte-Poisson ...
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Lacam, C.
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Tordjman, M.
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visa fler...
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Aubry, R.
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Zirath, Herbert, ...
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Rorsman, Niklas, ...
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visa färre...
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