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Electrical Characte...
Electrical Characterization and Transmission Electron Microscopy Assessment of Isolation of AlGaN/GaN High Electron Mobility Transistors with Oxygen Ion Implantation
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- Shiu, J. Y. (författare)
- National Chiao Tung University
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- Lu, C. Y. (författare)
- National Chiao Tung University
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- Su, T. Y. (författare)
- National Tsing Hua University
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- Huang, R. T. (författare)
- National Taiwan Ocean University
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- Zirath, Herbert, 1955 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Rorsman, Niklas, 1964 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Chang, E. Y. (författare)
- National Chiao Tung University
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(creator_code:org_t)
- 2010
- 2010
- Engelska.
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Ingår i: Japanese Journal of Applied Physics. - 1347-4065 .- 0021-4922. ; 49:2, s. Art. no. 021001-
- Relaterad länk:
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http://dx.doi.org/10...
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https://doi.org/10.1...
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https://research.cha...
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Abstract
Ämnesord
Stäng
- A multienergy oxygen ion implantation process was demonstrated to be compatible with the processing of high-power microwave AlGaN/GaN high electron mobility transistors (HEMTs). A high sheet resistivity and thermally stable isolation were demonstrated. The microstructures of implanted and postannealed specimens were investigated by transmission electron microscopy (TEM). The dependences of the sheet resistivity and different postannealing temperatures were correlated with the defect clusters and microstructure of lattice stacking faults. After 300 degrees C annealing, the sheet resistivity was higher than 10(12) Omega/square, which was attributed to the severe defect interaction eliminating the trapping centers and reducing the leakage current. A maximum output power density of 5.3 W/mm at V-gs = -4 V and V-ds = 50 V at 3 GHz was demonstrated on lag-free HEMTs without field plates on sapphire substrate.
Ämnesord
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Nyckelord
- hemts
- isolation technology
- dc
- raman characterization
- layers
- gan
- microwave performance
- sapphire
Publikations- och innehållstyp
- art (ämneskategori)
- ref (ämneskategori)
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