Sökning: onr:"swepub:oai:research.chalmers.se:abe0fcda-238a-45c2-a411-f93b509e4a60" >
XPS Study of Niobiu...
XPS Study of Niobium and Niobium-Nitride Nanofilms
-
- Lubenschenko, A. (författare)
- National Research University Moscow Power Engineering Institute
-
- Batrakov, A (författare)
- National Research University Moscow Power Engineering Institute
-
- Shurkaeva, I. V. (författare)
- National Research University Moscow Power Engineering Institute
-
visa fler...
-
- Pavolotskiy, Alexey, 1968 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Krause, Sascha, 1989 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
-
- Ivanov, Dmitriy (författare)
- National Research University Moscow Power Engineering Institute
-
- Lubenchenko, Olga (författare)
- National Research University Moscow Power Engineering Institute
-
visa färre...
-
(creator_code:org_t)
- 2018
- 2018
- Engelska.
-
Ingår i: Journal of Surface Investigation. - 1819-7094 .- 1027-4510. ; 12:4, s. 692-700
- Relaterad länk:
-
https://doi.org/10.1...
-
visa fler...
-
https://research.cha...
-
visa färre...
Abstract
Ämnesord
Stäng
- A new, XPS-based approach to quantitative and nondestructive determination of the chemical and phase layer composition of multicomponent multilayer films is proposed. It includes a new method for subtracting the background of repeatedly inelastically scattered photoelectrons, taking into account the inhomogeneity of inelastic scattering over depth; a new way of decomposing a photoelectron line into component peaks, taking into account the physical nature of various decomposition parameters; solution of the problem of subtracting the background and decomposing the photoelectron line simultaneously; and determination of the thickness of the layers of a multilayer target using a simple equation. The phase-layer composition of nanoscale Nb and NbN films is determined, and the thicknesses of these layers are calculated.
Ämnesord
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- XPS
- niobium nitride
- depth profiling
- XPS background
- niobium
- thin films
Publikations- och innehållstyp
- art (ämneskategori)
- ref (ämneskategori)
Hitta via bibliotek
Till lärosätets databas