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An XPS method for l...
An XPS method for layer profiling of NbN thin films
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- Lubenchenko, Alexander, 1966 (författare)
- National Research University Moscow Power Engineering Institute
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- Batrakov, A (författare)
- National Research University Moscow Power Engineering Institute
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- Pavolotskiy, Alexey, 1968 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Krause, Sascha, 1989 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Shurkaeva, I. V. (författare)
- National Research University Moscow Power Engineering Institute
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- Lubenchenko, Olga (författare)
- National Research University Moscow Power Engineering Institute
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- Ivanov, Dmitriy (författare)
- National Research University Moscow Power Engineering Institute
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(creator_code:org_t)
- 2016-12-13
- 2017
- Engelska.
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Ingår i: EPJ Web of Conferences. - : EDP Sciences. - 2101-6275 .- 2100-014X. ; 132, s. Art no 03053-
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https://www.epj-conf...
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https://research.cha...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Layer chemical and phase profiling of niobium nitride thin films on a silicon substrate oxidized on air was performed with the help of a method designed by us. The method includes: a new method of background subtraction of multiple inelastically scattered photoelectrons considering depth inhomogeneity of electron inelastic scattering; a new method of photoelectron line decomposition into component peaks considering physical nature of different decomposition parameters; joint solution of the background subtraction and photoelectron line decomposition problems; control of line decomposition accuracy with the help of a suggested performance criterion; calculation of layer thicknesses for a multilayer target using a simple formula.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Maskinteknik -- Rymd- och flygteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Mechanical Engineering -- Aerospace Engineering (hsv//eng)
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