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The Role of Mobile ...
The Role of Mobile Charge in Oxygen Plasma-Enhanced Silicon-to-Silicon Wafer Bonding
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- Raeissi, Bahman, 1979 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Sanz-Velasco, Anke, 1971 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Engström, Olof, 1943 (författare)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- The Electrochemical Society, 2010
- 2010
- Engelska.
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Ingår i: Electrochemical and Solid-State Letters. - : The Electrochemical Society. - 1099-0062. ; 13:6, s. H179-H181
- Relaterad länk:
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http://dx.doi.org/10...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Mechanical bonding energies of oxygen plasma treated and room-temperature wafer bonded silicon surfaces have been measured as a function of storage time in parallel with measurements of electrical interface properties. The surface energy increases with time dependence similar to that of decreasing interface state concentration. The current vs voltage behavior reveals the existence of mobile ions. We suggest that these mobile charges, after the reaction with the interface states, give rise to the increased surface energy responsible for bonding.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- silicon
- surface treatment
- elemental semiconductors
- wafer bonding
- surface energy
- plasma materials processing
- interface states
Publikations- och innehållstyp
- art (ämneskategori)
- ref (ämneskategori)
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