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Enumeration	Reference	Cover	Find
1.	2021 swepub:Mat__t
2.	Klionsky, Daniel J, et al. (author) Guidelines for the use and interpretation of assays for monitoring autophagy (3rd edition). 2016 In: Autophagy. - : Informa UK Limited. - 1554-8635 .- 1554-8627. ; 12:1, s. 1-222 Journal article (peer-reviewed)
3.	Wang, G., et al. (author) Impact of pattern dependency of SiGe layers grown selectively in source/drain on the performance of 22 nm node pMOSFETs 2015 In: Solid-State Electronics. - : Elsevier. - 0038-1101 .- 1879-2405. ; 114, s. 43-48 Journal article (peer-reviewed)abstract Pattern dependency of selective epitaxy of Si1-xGex (0.20 ≤ x ≤ 0.45) grown in recessed source/drain regions of 22 nm pMOSFETs has been studied. A complete substrate mapping over 200 mm wafers was performed and the transistors' characteristics were measured. The designed SiGe profile included a layer with Ge content of 40% at the bottom of recess (40 nm) and capped with 20% Ge as a sacrificial layer (20 nm) for silicide formation. The induced strain in the channel was simulated before and after silicidation. The variation of strain was localized and its effect on the transistors' performance was determined. The chips had a variety of SiGe profile depending on their distance (closest, intermediate and central) from the edge of the 200 mm wafer. SiGe layers with poor epi-quality were observed when the coverage of exposed Si of the chip was below 1%. This causes high Ge contents with layer thicknesses above the critical thickness.

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Type of publication: journal article (2)

Type of content: peer-reviewed (2)

Author/Editor: Zhang, Yan (1); Chen, L (1); Brown, J. (1); Chen, S. (1); Davies, M. (1); Gupta, S. (1); show more...; King, M. (1); Lopes, L. (1); Losada, M. (1); Moss, J. (1); Nayyar, R. (1); Negri, G. (1); Qureshi, A. (1); Rao, K. (1); Robson, A. (1); Romano, M. (1); Taylor, W. (1); Zhang, H. (1); Zhu, H. (1); Liu, J. (1); Morton, A. (1); Davies, E. (1); Horn, C. (1); Valente, P. (1); Guo, Y (1); Gupta, A. (1); Kelly, M. (1); Liu, T. (1); Bertoli, G (1); Li, J. (1); Coe, P. (1); Smith, M. (1); Price, S (1); Martin, J. (1); Aytac, E (1); Campain, N (1); Ceelen, W (1); Davies, RJ (1); Domingo, S (1); Ghosh, A (1); Golda, T (1); Hompes, R (1); Kumar, S (1); Lago, (1); Lakkis, Z (1); Maciel, J (1); Park, J (1); Rottoli, M (1); Shaikh, (1); Tsarkov, P (1); show less...

University: Karolinska Institutet (2); Umeå University (1); Royal Institute of Technology (1); Stockholm University (1); Linköping University (1); Lund University (1); show more...; Swedish University of Agricultural Sciences (1); show less...

Language: English (3)

Research subject (UKÄ/SCB): Natural sciences (1); Engineering and Technology (1); Medical and Health Sciences (1)

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