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1.	Bardos, Ladislav, et al. (author) the very high rate plasma jet dry etching technique 1990 In: Journal of the Electrochemical Society. - 0013-4651 .- 1945-7111. ; 137:5, s. 1588-1591 Journal article (peer-reviewed)
2.	Barklund, AM, et al. (author) Angular dependence on reactive ion beam etching 1990 In: Vuoto. ; XX:2, s. 467- Journal article (peer-reviewed)
3.	Barklund, AM, et al. (author) Basic studies of the RIBE process applied to the MOS gate spacer technology 1990 Conference paper (peer-reviewed)
4.	Barklund, AM, et al. (author) Influence of different etching mechanisms on the angular dependence of silicon nitride etching 1993 In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559. ; 11:4, s. 1226-1229 Journal article (peer-reviewed)
5.	Barklund, AM, et al. (author) Ion-assisted selective deposition of aluminium for via-hole interconnections 1993 In: Vacuum. - 0042-207X .- 1879-2715. ; 44:3-4, s. 197-201 Journal article (peer-reviewed)
6.	Barklund, AM, et al. (author) Patterning of silicon wafers using the plasma jet dry etching technique 1989 Conference paper (peer-reviewed)
7.	Barklund, AM, et al. (author) Patterning of silicon wafers using the plasma jet dry etching technique 1990 In: Vacuum. - 0042-207X .- 1879-2715. ; 41:4 Journal article (peer-reviewed)
8.	Barklund, AM, et al. (author) Plasma jet dry etching of silicon based compounds 1990 Conference paper (peer-reviewed)
9.	Berg, Sören, et al. (author) Atom assisted sputtering yield amplification 1992 In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - 0734-2101 .- 1520-8559. ; 10:4, s. 1592-1596 Journal article (peer-reviewed)
10.	Berg, Sören, et al. (author) Sputte erosion amplification 1992 In: Surface and Coatings Technology. ; 54-55, s. 131-135 Journal article (peer-reviewed)

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Result 1-10 of 14

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Type of publication: journal article (10); conference paper (4)

Type of content: peer-reviewed (14)

Author/Editor: Barklund, AM (14); Berg, Sören (13); Blom, Hans-Olof (7); Nender, C (7); Katardjiev, Ilia V (5); Carlsson, P (3); show more...; Lindberg, A (2); Norström, H (2); Bardos, Ladislav (2); Gelin, B (2); Barankova, Hana (1); Bardos, L (1); Katardjiev, IV (1); Biersack, JP (1); show less...

University: Uppsala University (14)

Language: English (14)

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