| 1. |
- Brizuela, Fernando, et al.
(author)
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Extreme ultraviolet laser-based table-top aerial image metrology of lithographic masks
- 2010
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In: Optics Express. - : Optical Society of America. - 1094-4087. ; 18:14, s. 14467-14473
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Journal article (peer-reviewed)abstract
- We have realized the first demonstration of a table-top aerial imaging microscope capable of characterizing pattern and defect printability in extreme ultraviolet lithography masks. The microscope combines the output of a 13.2 nm wavelength, table-top, plasma-based, EUV laser with zone plate optics to mimic the imaging conditions of an EUV lithographic stepper. We have characterized the illumination of the system and performed line-edge roughness measurements on an EUVL mask. The results open a path for the development of a compact aerial imaging microscope for high-volume manufacturing.
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| 2. |
- Brizuela, Fernando, et al.
(author)
-
Table-top Extreme Ultraviolet Laser Aerial Imaging of Lithographic Masks
- 2010
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In: 2010 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) AND QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (QELS). - 9781557528902
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Conference paper (peer-reviewed)abstract
- We report the first at-wavelength line edge roughness measurements of patterned EUV lithography masks realized using a table-top aerial imaging system based on a table-top lambda=13.2 laser.
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| 3. |
- Brewer, Courtney A., et al.
(author)
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High spatial resolution full-field microscopy using a desktop-size soft x-ray laser
- 2007
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In: Proceedings of SPIE. - : SPIE.
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Conference paper (peer-reviewed)abstract
- Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hv = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.
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| 4. |
- Brewer, Courtney A., et al.
(author)
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Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution
- 2008
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In: Optics Letters. - : Optical Society of America. - 0146-9592 .- 1539-4794. ; 33:5, s. 518-520
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Journal article (peer-reviewed)abstract
- We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures.
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| 5. |
- Brizuela, David, et al.
(author)
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xPert : computer algebra for metric perturbation theory
- 2009
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In: GENERAL RELATIVITY AND GRAVITATION. - : Springer Science and Business Media LLC. - 0001-7701 .- 1572-9532. ; 41:10, s. 2415-2431
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Journal article (peer-reviewed)abstract
- We present the tensor computer algebra package xPert for fast construction and manipulation of the equations of metric perturbation theory, around arbitrary backgrounds. It is based on the combination of explicit combinatorial formulas for the nth order perturbation of curvature tensors and their gauge changes, and the use of highly efficient techniques of index canonicalization, provided by the underlying tensor system xAct, for Mathematica. We give examples of use and show the efficiency of the system with timings plots: it is possible to handle orders n = 4 or n = 5 within seconds, or reach n = 10 with timings below 1 h.
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| 6. |
- Brizuela, Fernando, et al.
(author)
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Efficient high order harmonic generation boosted by below threshold harmonics
- 2013
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In: Scientific Reports. - : Springer Science and Business Media LLC. - 2045-2322. ; 3
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Journal article (peer-reviewed)abstract
- High-order harmonic generation (HHG) in gases has been established as an important technique for the generation of coherent extreme ultraviolet (XUV) pulses at ultrashort time scales. Its main drawback, however, is the low conversion efficiency, setting limits for many applications, such as ultrafast coherent imaging, nonlinear processes in the XUV range, or seeded free electron lasers. Here we introduce a novel scheme based on using below-threshold harmonics, generated in a seeding cell, to boost the HHG process in a generation cell, placed further downstream in the focused laser beam. By modifying the fundamental driving field, these low-order harmonics alter the ionization step of the nonlinear HHG process. Our dual-cell scheme enhances the conversion efficiency of HHG, opening the path for the realization of robust intense attosecond XUV sources.
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| 7. |
- Brizuela, Fernando, et al.
(author)
-
Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes
- 2012
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In: IEEE Journal of Selected Topics in Quantum Electronics. - 1077-260X. ; 18:1, s. 434-442
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Journal article (peer-reviewed)abstract
- The demonstration of table-top high average power extreme-ultraviolet (EUV) lasers combined with the engineering of specialized optics has enabled the demonstration of full-field microscopes that have achieved tens of nanometer spatial resolution. This paper describes the geometry of the EUV microscopes tailored to specific imaging applications. The microscope illumination characteristics are assessed and an analysis on the microscope's spatial resolution is presented. Examples of the capabilities of these table-top EUV aerial microscopes for imaging nanostructures and surfaces are presented.
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| 8. |
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| 9. |
- Louisy, Maite, et al.
(author)
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Gating attosecond pulses in a noncollinear geometry
- 2015
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In: Optica. - 2334-2536. ; 2:6, s. 563-566
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Journal article (peer-reviewed)abstract
- The efficient generation of isolated attosecond pulses (IAPs), giving access to ultrafast electron dynamics in various systems, is a key challenge in attosecond science. IAPs can be produced by confining the extreme ultraviolet emission generated by an intense laser pulse to a single field half-cycle or, as shown recently, by employing angular streaking methods. Here, we experimentally demonstrate the angular streaking of attosecond pulse trains in a noncollinear geometry, leading to the emission of angularly separated IAPs. The noncollinear geometry simplifies the separation of the fundamental laser field and the generated pulses, making this scheme promising for intracavity attosecond pulse generation, thus opening new possibilities for high-repetition-rate attosecond sources. (C) 2015 Optical Society of America
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