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1.
  • Moran, Kari, et al. (author)
  • Frequency Resolution of a Multi Degree of Freedom Resonator
  • 2009
  • In: 2009 IEEE Sensors. ; , s. 865-868
  • Conference paper (peer-reviewed)abstract
    • This paper outlines the process for estimating measurable parameters in a multi degree of freedom micro resonator. Thermal mechanical noise provides a baseline limit for frequency resolution of micro resonators. We develop the likelihood function for a linear regression model of 2 degree of freedom resonator. Using the Cramer-Rao inequality we determine the minimum possible covariance to estimate parameters, such as the natural frequency of the system.
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2.
  • Schitter, Georg, et al. (author)
  • Design and Modeling of a High-Speed AFM-Scanner
  • 2007
  • In: IEEE Transactions on Control Systems Technology. - 1558-0865. ; 15:5, s. 906-915
  • Journal article (peer-reviewed)abstract
    • A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.
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