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  • Tian, Jie, et al. (author)
  • Optical Quality Improvement of Si Photonic Devices Fabricated by Focused-Ion-Beam Milling
  • 2009
  • In: Journal of Lightwave Technology. - 0733-8724 .- 1558-2213. ; 27:19, s. 4306-4310
  • Journal article (peer-reviewed)abstract
    • Focused-ion-beam directly milling strategy was used to fabricate photonic resonators on crystalline silicon-on-insulator substrate. In order to reduce damages such as implanting ions, amorphous layers and re-deposition process which are induced by the ions, a sacrificed silica layer was used as an etching mask and a silicon thermal oxidation process was performed. The transmission spectra of both photonic crystal cavities and micro-ring resonators were measured. The resulting data demonstrate that the Q factors are significantly improved after the oxidation treatment.
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Type of publication
journal article (1)
Type of content
peer-reviewed (1)
Author/Editor
Li, Zhiyuan (1)
Qiu, Min (1)
Luo, Jun (1)
Yan, Wei (1)
Tian, Jie (1)
Liu, Yazhao (1)
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Zhang, Daozhong (1)
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University
Royal Institute of Technology (1)
Language
English (1)
Year
2009 (1)

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