| 1. |
- Aad, G, et al.
(author)
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- 2015
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swepub:Mat__t
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| 2. |
- Bogaerts, Wim, et al.
(author)
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Programmable Photonic Circuits powered by Silicon Photonic MEMS Technology
- 2022
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In: Photonic Networks and Devices, Networks 2022. - : Optica Publishing Group (formerly OSA).
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Conference paper (peer-reviewed)abstract
- Programmable photonic chips allow flexible reconfiguration of on-chip optical connections, controlled through electronics and software. We will present the recent progress of such complex photonic circuits powered by silicon photonic MEMS actuators.
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| 3. |
- Bogaerts, Wim, et al.
(author)
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Programmable silicon photonic circuits powered by MEMS
- 2022
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In: Proceedings of SPIE - The International Society for Optical Engineering. - : SPIE-Intl Soc Optical Eng.
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Conference paper (peer-reviewed)abstract
- We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.
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| 4. |
- Khan, Umar, et al.
(author)
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MORPHIC : MEMS enhanced silicon photonics for programmable photonics
- 2022
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In: Integrated Photonics Platforms Ii. - : SPIE-Intl Soc Optical Eng.
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Conference paper (peer-reviewed)abstract
- We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs).
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| 5. |
- Bogaerts, Wim, et al.
(author)
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Scaling programmable silicon photonics circuits
- 2023
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In: Silicon Photonics XVIII. - : SPIE-Intl Soc Optical Eng.
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Conference paper (peer-reviewed)abstract
- We give an overview the progress of our work in silicon photonic programmable circuits, covering the techn stack from the photonic chip over the driver electronics, packaging technologies all the way to the sof layers. On the photonic side, we show our recent results in large-scale silicon photonic circuits with diff tuning technologies, including heaters, MEMS and liquid crystals, and their respective electronic driving sch We look into the scaling potential of these different technologies as the number of tunable elements in a ci increases. Finally, we elaborate on the software routines for routing and filter synthesis to enable the pho programmer.
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| 6. |
- Khan, Umar, et al.
(author)
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Low power actuators for programmable photonic processors
- 2023
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In: AI and Optical Data Sciences IV. - : SPIE-Intl Soc Optical Eng.
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Conference paper (peer-reviewed)abstract
- The demand for efficient actuators in photonics has peaked with increasing popularity for large-scale general-purpose programmable photonics circuits. We present our work to enhance an established silicon photonics platform with low-power micro-electromechanical (MEMS) and liquid crystal (LC) actuators to enable large-scale programmable photonic integrated circuits (PICs).
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| 7. |
- Quack, Niels, et al.
(author)
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Integrated silicon photonic MEMS
- 2023
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In: MICROSYSTEMS & NANOENGINEERING. - : Springer Nature. - 2055-7434. ; 9:1
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Journal article (peer-reviewed)abstract
- Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and quantum information processing. The success of silicon photonics has been enabled by the unique combination of performance, high yield, and high-volume capacity that can only be achieved by standardizing manufacturing technology. Today, standardized silicon photonics technology platforms implemented by foundries provide access to optimized library components, including low-loss optical routing, fast modulation, continuous tuning, high-speed germanium photodiodes, and high-efficiency optical and electrical interfaces. However, silicon's relatively weak electro-optic effects result in modulators with a significant footprint and thermo-optic tuning devices that require high power consumption, which are substantial impediments for very large-scale integration in silicon photonics. Microelectromechanical systems (MEMS) technology can enhance silicon photonics with building blocks that are compact, low-loss, broadband, fast and require very low power consumption. Here, we introduce a silicon photonic MEMS platform consisting of high-performance nano-opto-electromechanical devices fully integrated alongside standard silicon photonics foundry components, with wafer-level sealing for long-term reliability, flip-chip bonding to redistribution interposers, and fibre-array attachment for high port count optical and electrical interfacing. Our experimental demonstration of fundamental silicon photonic MEMS circuit elements, including power couplers, phase shifters and wavelength-division multiplexing devices using standardized technology lifts previous impediments to enable scaling to very large photonic integrated circuits for applications in telecommunications, neuromorphic computing, sensing, programmable photonics, and quantum computing.
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