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  • Blomqvist, M., et al. (author)
  • Structural and tribological properties of cluster-assembled CNx films
  • 2007
  • In: Applied Physics A. - : Springer Science and Business Media LLC. - 0947-8396 .- 1432-0630. ; 87:4, s. 767-772
  • Journal article (peer-reviewed)abstract
    • We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system.
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journal article (1)
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peer-reviewed (1)
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Csillag, Stefan (1)
Kreissig, U. (1)
Coronel, Ernesto (1)
Blomqvist, M (1)
Bongiorno, G. (1)
Podesta, A. (1)
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Serin, V. (1)
Abrasonis, G. (1)
Moeller, W. (1)
Wachtmeister, Staffa ... (1)
Cassina, V. (1)
Piseri, P. (1)
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Uppsala University (1)
Stockholm University (1)
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