| 1. |
- Gangaprasad Rao, Smita, et al.
(author)
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Low temperature epitaxial growth of Cantor-nitride thin films by magnetic field assisted magnetron sputtering
- 2023
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In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 41:5
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Journal article (peer-reviewed)abstract
- Low-temperature epitaxial growth of multicomponent alloy-based thin films remains an outstanding challenge in materials science and is important for established fundamental properties of these complex materials. Here, Cantor nitride (CrMnFeCoNi)N thin films were epitaxially grown on MgO(100) substrates at low deposition temperature by magnetic-field-assisted dc-magnetron sputtering, a technique where a magnetic field is applied to steer the dense plasma to the substrate thereby influencing the flux of Ar-ions bombarding the film during growth. Without ion bombardment, the film displayed textured growth. As the ion flux was increased, the films exhibited epitaxial growth. The epitaxial relationship between film and substrate was found to be cube on cube (001)film parallel to(001)MgO, [100]film parallel to[100]MgO. The epitaxy was retained up to a thickness of approximately similar to 100 nm after which the growth becomes textured with a 002 out-of-plane orientation. The elastic constants determined by Brillouin inelastic light scattering were found to be C-11 = 320 GPa, C-12 = 125 GPa, and C-44 = 66 GPa, from which the polycrystalline Young's modulus was calculated as 204 GPa and Poisson's ratio = 0.32, whereas available elastic properties still remained very scarce.
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| 2. |
- Pallier, Camille, et al.
(author)
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Thermal, electrical, and mechanical properties of hard nitrogen-alloyed Cr thin films deposited by magnetron sputtering
- 2022
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In: Surface & Coatings Technology. - : Elsevier Science SA. - 0257-8972 .- 1879-3347. ; 441
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Journal article (peer-reviewed)abstract
- Cr-N based materials, including stoichiometric CrN and Cr:N with a wide range of nitrogen contents, are commonly used as hard and corrosion-resistant coatings. Cr-rich films in this materials system can retain the bcc structure of metallic Cr with few percent of dissolved nitrogen, which can be used for tailoring the mechanical, thermal, and electrical properties. Here, we investigated low nitrogen containing Cr thin films deposited by high ion assisted magnetron sputtering with a substrate temperature of 200 degrees C. With the gas flow ratio maintained at f(N2/Ar) = 0.02, the substrate bias and the target power allows for control of the film composition (0.03 < N/Cr < 0.34). The films comprise a mixture of bcc-Cr and hexagonal Cr2N1-delta phases. The mechanical properties studied by nanoindentation and Brillouin inelastic light scattering revealed a hardening effect due to the multiphase nanostructure. The mechanical properties of the Cr:N films depend on the residual stress, on the amount of h-Cr2N1-delta phase and on the nanostructuring nature of the coatings. A maximum hardness of 37 GPa was achieved for a dense film with a Youngs modulus of 340 GPa, a shear modulus of 118 GPa, and a relatively low thermal conductivity of 7 W/mK.
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