| 1. |
- Björling, Alexander, et al.
(author)
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Contrast - a lightweight Python framework for beamline orchestration and data acquisition
- 2021
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In: Journal of Synchrotron Radiation. - 1600-5775. ; 28:4, s. 1253-1260
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Journal article (peer-reviewed)abstract
- The emergence of fourth-generation synchrotrons is prompting the development of new systems for experimental control and data acquisition. However, as general control systems are designed to cover a wide set of instruments and techniques, they tend to become large and complicated, at the cost of experimental flexibility. Here we present Contrast, a simple Python framework for interacting with beamline components, orchestrating experiments and managing data acquisition. The system is presented and demonstrated via its application at the NanoMAX beamline of the MAX IV Laboratory.
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| 2. |
- Björling, Alexander, et al.
(author)
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Ptychographic characterization of a coherent nanofocused X-ray beam
- 2020
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In: Optics Express. - : OPTICAL SOC AMER. - 1094-4087. ; 28:4, s. 5069-5076
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Journal article (peer-reviewed)abstract
- The NanoMAX hard X-ray nanoprobe is the first beamline to take full advantage of the diffraction-limited storage ring at the MAX IV synchrotron and delivers a high coherent photon flux for applications in diffraction and imaging. Here, we characterize its coherent and focused beam using ptychographic analysis. We derive beam profiles in the energy range 6-22 keV and estimate the coherent flux based on a probe mode decomposition approach.
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| 3. |
- Bäcke, Olof, 1984, et al.
(author)
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Decomposition pathways in nano-lamellar CVD Ti 0.2 Al 0.8 N
- 2023
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In: Materialia. - 2589-1529. ; 30
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Journal article (peer-reviewed)abstract
- Recent progress in chemical vapour deposition (CVD) technology has enabled synthesis of metastable cubic Ti1−xAlxN coatings with x as high as 0.8–0.9. These coatings have unique micro- and nano-structures consisting of grains with epitaxially grown nanolamellae with different Al/Ti ratios, and exhibit exceptional hardness and resistance to wear and oxidation. Here, the thermal stability and decomposition of nano-lamellar CVD Ti0.2Al0.8N at temperatures between 800 and 1000 °C have been investigated using a combination of cross-sectional transmission X-ray nano-diffraction and scanning transmission electron microscopy. The decomposition started by formation of hexagonal AlN (h-AlN) in the grain boundaries throughout the coating. Below 900 °C, only limited further decomposition of the grain interiors occurred. At higher temperatures the formation of grain boundary h-AlN was followed by a bulk transformation of the nano-lamellar structure, starting at the top of the coating and subsequently sweeping inwards. The bulk transformation occurred initially through spinodal decomposition, followed by transformation of the Al-rich cubic phase to h-AlN, leading to a coarsened structure with Ti-rich domains in a h-AlN matrix. The behaviour is explained by the higher capability of grain boundaries and free surfaces to accommodate the volumetric expansion from the h-AlN formation. The results increase our understanding of the complicated decomposition processes in these metastable cubic coatings, which are of utmost importance from both technological and scientific perspectives.
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| 4. |
- Bäcke, Olof, et al.
(author)
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Decomposition pathways in nano-lamellar CVD Ti0.2Al0.8N
- 2023
-
In: Materialia. - 2589-1529. ; 30
-
Journal article (peer-reviewed)abstract
- Recent progress in chemical vapour deposition (CVD) technology has enabled synthesis of metastable cubic Ti1−xAlxN coatings with x as high as 0.8–0.9. These coatings have unique micro- and nano-structures consisting of grains with epitaxially grown nanolamellae with different Al/Ti ratios, and exhibit exceptional hardness and resistance to wear and oxidation. Here, the thermal stability and decomposition of nano-lamellar CVD Ti0.2Al0.8N at temperatures between 800 and 1000 °C have been investigated using a combination of cross-sectional transmission X-ray nano-diffraction and scanning transmission electron microscopy. The decomposition started by formation of hexagonal AlN (h-AlN) in the grain boundaries throughout the coating. Below 900 °C, only limited further decomposition of the grain interiors occurred. At higher temperatures the formation of grain boundary h-AlN was followed by a bulk transformation of the nano-lamellar structure, starting at the top of the coating and subsequently sweeping inwards. The bulk transformation occurred initially through spinodal decomposition, followed by transformation of the Al-rich cubic phase to h-AlN, leading to a coarsened structure with Ti-rich domains in a h-AlN matrix. The behaviour is explained by the higher capability of grain boundaries and free surfaces to accommodate the volumetric expansion from the h-AlN formation. The results increase our understanding of the complicated decomposition processes in these metastable cubic coatings, which are of utmost importance from both technological and scientific perspectives.
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| 5. |
- Carbone, Dina, et al.
(author)
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Design and performance of a dedicated coherent X-ray scanning diffraction instrument at beamline NanoMAX of MAX IV
- 2022
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In: Journal of Synchrotron Radiation. - 1600-5775. ; 29, s. 876-887
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Journal article (peer-reviewed)abstract
- The diffraction endstation of the NanoMAX beamline is designed to provide high-flux coherent X-ray nano-beams for experiments requiring many degrees of freedom for sample and detector. The endstation is equipped with high-efficiency Kirkpatrick-Baez mirror focusing optics and a two-circle goniometer supporting a positioning and scanning device, designed to carry a compact sample environment. A robot is used as a detector arm. The endstation, in continued development, has been in user operation since summer 2017.
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| 6. |
- Dzhigaev, Dmitry, et al.
(author)
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Strain mapping inside an individual processed vertical nanowire transistor using scanning X-ray nanodiffraction
- 2020
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In: Nanoscale. - : Royal Society of Chemistry (RSC). - 2040-3372 .- 2040-3364. ; 12:27, s. 14487-14493
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Journal article (peer-reviewed)abstract
- Semiconductor nanowires in wrapped, gate-all-around transistor geometry are highly favorable for future electronics. The advanced nanodevice processing results in strain due to the deposited dielectric and metal layers surrounding the nanowires, significantly affecting their performance. Therefore, non-destructive nanoscale characterization of complete devices is of utmost importance due to the small feature sizes and three-dimensional buried structure. Direct strain mapping inside heterostructured GaSb-InAs nanowire tunnel field-effect transistor embedded in dielectric HfO2, W metal gate layers, and an organic spacer is performed using fast scanning X-ray nanodiffraction. The effect of 10 nm W gate on a single embedded nanowire with segment diameters down to 40 nm is retrieved. The tensile strain values reach 0.26% in the p-type GaSb segment of the transistor. Supported by the finite element method simulation, we establish a connection between the Ar pressure used during the W layer deposition and the nanowire strain state. Thus, we can benchmark our models for further improvements in device engineering. Our study indicates, how the significant increase in X-ray brightness at 4th generation synchrotron, makes high-throughput measurements on realistic nanoelectronic devices viable.
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| 7. |
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| 8. |
- Hammarberg, Susanna, et al.
(author)
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High resolution strain mapping of a single axially heterostructured nanowire using scanning X-ray diffraction
- 2020
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In: Nano Research. - : Springer Science and Business Media LLC. - 1998-0124 .- 1998-0000. ; 13:9, s. 2460-2468
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Journal article (peer-reviewed)abstract
- Axially heterostructured nanowires are a promising platform for next generation electronic and optoelectronic devices. Reports based on theoretical modeling have predicted more complex strain distributions and increased critical layer thicknesses than in thin films, due to lateral strain relaxation at the surface, but the understanding of the growth and strain distributions in these complex structures is hampered by the lack of high-resolution characterization techniques. Here, we demonstrate strain mapping of an axially segmented GaInP-InP 190 nm diameter nanowire heterostructure using scanning X-ray diffraction. We systematically investigate the strain distribution and lattice tilt in three different segment lengths from 45 to 170 nm, obtaining strain maps with about 10−4 relative strain sensitivity. The experiments were performed using the 90 nm diameter nanofocus at the NanoMAX beamline, taking advantage of the high coherent flux from the first diffraction limited storage ring MAX IV. The experimental results are in good agreement with a full simulation of the experiment based on a three-dimensional (3D) finite element model. The largest segments show a complex profile, where the lateral strain relaxation at the surface leads to a dome-shaped strain distribution from the mismatched interfaces, and a change from tensile to compressive strain within a single segment. The lattice tilt maps show a cross-shaped profile with excellent qualitative and quantitative agreement with the simulations. In contrast, the shortest measured InP segment is almost fully adapted to the surrounding GaInP segments. [Figure not available: see fulltext.].
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| 9. |
- Johansson, Ulf, et al.
(author)
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NanoMAX : the hard X-ray nanoprobe beamline at the MAX IV Laboratory
- 2021
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In: Journal of Synchrotron Radiation. - : International Union of Crystallography (IUCr). - 0909-0495 .- 1600-5775. ; 28, s. 1935-1947
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Journal article (peer-reviewed)abstract
- NanoMAX is the first hard X-ray nanoprobe beamline at the MAX IV laboratory. It utilizes the unique properties of the world's first operational multi-bend achromat storage ring to provide an intense and coherent focused beam for experiments with several methods. In this paper we present the beamline optics design in detail, show the performance figures, and give an overview of the surrounding infrastructure and the operational diffraction endstation.
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| 10. |
- Kahnt, Maik, et al.
(author)
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Complete alignment of a KB-mirror system guided by ptychography
- 2022
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In: Optics Express. - 1094-4087. ; 30:23, s. 42308-42322
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Journal article (peer-reviewed)abstract
- We demonstrate how the individual mirrors of a high-quality Kirkpatrick-Baez (KB) mirror system can be aligned to each other to create an optimally focused beam, through minimizing aberrations in the phase of the ptychographically reconstructed pupil function. Different sources of misalignment and the distinctive phase artifacts they create are presented via experimental results from the alignment of the KB mirrors at the NanoMAX diffraction endstation. The catalog of aberration artifacts can be used to easily identify which parameter requires further tuning in the alignment of any KB mirror system.
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