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  • Junique, Stephan, et al. (author)
  • GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process
  • 2005
  • In: Applied Optics. - 1559-128X .- 2155-3165. ; 44:9, s. 1635-1641
  • Journal article (peer-reviewed)abstract
    • The design, fabrication, and characterization of large, two-dimensional multiple-quantum-well modulator arrays are presented. Such arrays present a speed advantage compared with competing technologies such as liquid crystals and micromirrors, which are intrinsically limited to the kilohertz range. We discuss the design compromises to reach high-contrast, low-voltage swing optical structures compatible with complementary metal-oxide semiconductor-based integrated circuits and present experimental results. Contrast ratio of 5:1 (limited by the fill factor), variations in uniformity below 1 nm, and frame rates in excess of 10 kHz are demonstrated. Technology maturity for volume production is also discussed.
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Type of publication
journal article (1)
Type of content
peer-reviewed (1)
Author/Editor
Wang, Qin (1)
Andersson, Jan Y. (1)
Guo, J.-H. (1)
Almqvist, S (1)
Noharet, Bertrand (1)
Junique, Stephan (1)
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Martijn, Henk (1)
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University
Royal Institute of Technology (1)
Language
English (1)
Research subject (UKÄ/SCB)
Engineering and Technology (1)
Year

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