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  • Böhlmark, Johan, et al. (author)
  • Spatial electron density distribution in a high-power pulsed magnetron discharge
  • 2005
  • In: IEEE Transactions on Plasma Science. - 0093-3813 .- 1939-9375. ; 33:2, s. 346-347
  • Journal article (peer-reviewed)abstract
    • The spatial electron density distribution was measured as function of time in a high-power pulsed magnetron discharge. A Langmuir probe was positioned in various positions below the target and the electron density was mapped out. We recorded peak electron densities exceeding 1019 m-3 in a close vicinity of the target. The dynamics of the discharge showed a dense plasma expanding from the "race-track" axially into the vacuum chamber. We also record electrons trapped in a magnetic bottle where the magnetron magnetic field is zero, formed due to the unbalanced magnetron.
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Type of publication
journal article (1)
Type of content
peer-reviewed (1)
Author/Editor
Helmersson, Ulf (1)
Gudmundsson, J. T. (1)
Alami, Jones (1)
Böhlmark, Johan (1)
Lattemann, Martina (1)
University
Linköping University (1)
Language
English (1)
Year
2005 (1)

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