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  • MacMillan, Mike F., et al. (author)
  • Infrared Reflectance of Extremely Thin AlN Epi Films Deposited on SiC Substrates
  • 1998
  • In: Materials Science Forum Vols. 264-268. ; , s. 649-652
  • Conference paper (peer-reviewed)abstract
    • The room temperature reflectance of thin (£ 1000Å) AlN epi-films deposited on n type 6H SiC has been measure. These epi-films are too thin to produce interference fringes, from which epi-films thickness is often extracted, within the measured spectral region. However, features from the AlN reststrahl reflectance band can be clearly seen for AlN epi-films as thin as 250Å. Thicknesses are extracted from the measured spectra by comparing them directly to calculated spectra with the epi-film thickness being the only fitting parameter. The accuracy of these thickness determinations is confirmed by comparing them to thickness measured on samples studied by cross sectional TEM.
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Type of publication
conference paper (1)
Type of content
peer-reviewed (1)
Author/Editor
Janzén, Erik (1)
Hultman, Lars (1)
Forsberg, Urban, 197 ... (1)
Persson, P. O. Å. (1)
MacMillan, Mike F. (1)
University
Linköping University (1)
Language
English (1)
Research subject (UKÄ/SCB)
Engineering and Technology (1)
Year
1998 (1)

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