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- MacMillan, Mike F., et al.
(author)
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Infrared Reflectance of Extremely Thin AlN Epi Films Deposited on SiC Substrates
- 1998
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In: Materials Science Forum Vols. 264-268. ; , s. 649-652
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Conference paper (peer-reviewed)abstract
- The room temperature reflectance of thin (£ 1000Å) AlN epi-films deposited on n type 6H SiC has been measure. These epi-films are too thin to produce interference fringes, from which epi-films thickness is often extracted, within the measured spectral region. However, features from the AlN reststrahl reflectance band can be clearly seen for AlN epi-films as thin as 250Å. Thicknesses are extracted from the measured spectra by comparing them directly to calculated spectra with the epi-film thickness being the only fitting parameter. The accuracy of these thickness determinations is confirmed by comparing them to thickness measured on samples studied by cross sectional TEM.
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