SwePub
Sök i SwePub databas

  Extended search

Träfflista för sökning "onr:"swepub:oai:DiVA.org:liu-49575" "

Search: onr:"swepub:oai:DiVA.org:liu-49575"

  • Result 1-1 of 1
Sort/group result
   
EnumerationReferenceCoverFind
1.
  • Edwards, NV, et al. (author)
  • Real-time assessment of selected surface preparation regimens for 4H-SiC surfaces using spectroscopic ellipsometry
  • 2000
  • In: Surface Science. - : Elsevier. - 0039-6028 .- 1879-2758. ; 464:1, s. L703-L707
  • Journal article (peer-reviewed)abstract
    • Spectroscopic ellipsometry (SE) was used to assess the removal of overlayer material from 4H-SiC (0001) and (0001) [Si- and C-face] surfaces in real time and, in particular, the critical final step of an otherwise standard RCA cleaning regimen commonly used to prepare SiC surfaces for contact formation. The treatments selected [buffered hydrofluoric acid (HF), concentrated HF, and dilute HF] removed 4-40 Angstrom of effective SiO2 overlayer thickness from these surfaces. The concentrated HF treatment yielded the best surface, i.e. that with the most abrupt transition region between bulk and surface and with the most oxide material removed. A fourth treatment regimen (sequential application of methanol, water, and 5% HF in methanol) was also developed for comparison with the full RCA clean. (C) 2000 Elsevier Science B.V. All rights reserved.
  •  
Skapa referenser, mejla, bekava och länka
  • Result 1-1 of 1
Type of publication
journal article (1)
Type of content
peer-reviewed (1)
Author/Editor
Järrendahl, Kenneth (1)
Madsen, LD (1)
Richter, W (1)
Cobet, C. (1)
Esser, N. (1)
Edwards, NV (1)
show more...
Robbie, K (1)
Powell, GD (1)
Aspnes, DE (1)
show less...
University
Linköping University (1)
Language
English (1)
Year
2000 (1)

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

 
pil uppåt Close

Copy and save the link in order to return to this view