Träfflista för sökning "WFRF:(Possnert G.) srt2:(1978-1979)"

Sort/group result

Sort by: Hits per page:

Enumeration	Reference	Cover	Find
1.	Petersson, Sture, et al. (author) Oxygen distribution profiles in thin evaporated contacts on single crystal silicon 1978 In: Nuclear instruments and methods. ; 149, s. 285-288 Journal article (peer-reviewed)abstract The nuclear resonance in the l6O(a, a)l6O elastic scattering reaction at 3.045 MeV has been used in concentration profilemeasurements ol oxygen in thin-film structuresThe concentration profile can be deduced lrom an energy scan ol the incoming a-particies, thus shifting the resonanceto different depths in the sample. The methocl has been applie
2.	Possnert, G, et al. (author) Oxygen content and depth profiling in silicon surface technology studied by the 16O(α, α)16O resonance at 3.045 MeV 1978 In: Physica Scripta. - 0031-8949 .- 1402-4896. ; 18, s. 353-356 Journal article (peer-reviewed)abstract The use of the t6O(o,o)160 elastic scattering resonance reaction forthe study of low concentration of oxygen such as found in interfacesin silicon technology is described. We have investigated the depth resolution and the limit of the sensitivity that can be obtained with thismethod. The method has been applied to the study of AlrQ{r "sandwich" film structures and to Au and amorphous Ge contacts to silicon.

Skapa referenser, mejla, bekava och länka

Author/Editor: Petersson, Sture (2); Possnert, G (2); Orre, B (2); Norde, Herman (1); Fahlander, C. (1); Norde, H (1); show more...; Tove, P. A. (1); show less...

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

Copy and save the link in order to return to this view