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- Markevich, VP, et al.
(author)
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Defect reactions associated with divacancy elimination in silicon
- 2003
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In: Journal of Physics: Condensed Matter. - : IOP Publishing. - 1361-648X .- 0953-8984. ; 15:39, s. 2779-2789
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Journal article (peer-reviewed)abstract
- Defect reactions associated with the elimination of divacancies (V-2) have been studied in n-type Czochralski (Cz) grown and float-zone (FZ) grown Si crystals by means of conventional deep-level transient spectroscopy and high-resolution Laplace deep-level transient spectroscopy (LDLTS). Divacancies were introduced into the crystals by irradiation with 4 MeV electrons. Temperature ranges of the divacancy disappearance were found to be 225-275 degreesC in Cz Si crystals and 300-350 degreesC in FZ Si crystals upon 30 min isochronal annealing. Simultaneously with the V-2 disappearance in Cz Si crystals a correlated appearance of two electron traps with activation energies for electron emission 0.23 eV {E(0.23)} and 0.47 eV {E(0.47)} was observed. It is argued that the main mechanism of the V-2 disappearance in Cz Si crystals is related to the interaction of mobile divacancies with interstitial oxygen atoms. This interaction results in the formation Of V2O centres, which are responsible for the E(0.23) and E(0.47) traps. Electronic properties of the V2O complex were found to be very similar to those of V-2 but energy levels of the two defects could easily be separated using LDLTS. In FZ Si crystals, a few electron traps appeared simultaneously with the V-2 annihilation. The small concentration of these traps compared with the V-2 concentration before annealing prevented their reliable identification.
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