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- Alavian Ghavanini, Farzan, 1978, et al.
(author)
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A method to evaluate MEMS bonding
- 2006
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In: Micro Structure Workshop 2006. ; 1:1, s. 47-B3d
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Conference paper (peer-reviewed)
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2. |
- Alavian Ghavanini, Farzan, 1978, et al.
(author)
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An easy-to-implement method for evaluation of capacitive resonant sensors
- 2006
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In: Journal of Micromechanics and Microengineering. - 1361-6439 .- 0960-1317. ; 16:6, s. s156-s160
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Journal article (peer-reviewed)abstract
- A novel method that can be used to characterize resonant capacitive sensors is presented. The method is based on measurement of the third harmonic of the current through the capacitor; thus the detection signal is frequencyseparated from the excitation signal. The measurement is time-continuousand only requires a very simple resonant structure where a single electrode is simultaneously used for excitation and detection. The readout circuit iseasily implemented with a single operational amplifier and standard equipment such as a lock-in amplifier or a function generator and a spectrum analyzer. Measurements of a resonant structure confirm the feasibility of the concept.
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