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Träfflista för sökning "WFRF:(Alavian Ghavanini Farzan 1978) srt2:(2006)"

Search: WFRF:(Alavian Ghavanini Farzan 1978) > (2006)

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1.
  • Alavian Ghavanini, Farzan, 1978, et al. (author)
  • A method to evaluate MEMS bonding
  • 2006
  • In: Micro Structure Workshop 2006. ; 1:1, s. 47-B3d
  • Conference paper (peer-reviewed)
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2.
  • Alavian Ghavanini, Farzan, 1978, et al. (author)
  • An easy-to-implement method for evaluation of capacitive resonant sensors
  • 2006
  • In: Journal of Micromechanics and Microengineering. - 1361-6439 .- 0960-1317. ; 16:6, s. s156-s160
  • Journal article (peer-reviewed)abstract
    • A novel method that can be used to characterize resonant capacitive sensors is presented. The method is based on measurement of the third harmonic of the current through the capacitor; thus the detection signal is frequencyseparated from the excitation signal. The measurement is time-continuousand only requires a very simple resonant structure where a single electrode is simultaneously used for excitation and detection. The readout circuit iseasily implemented with a single operational amplifier and standard equipment such as a lock-in amplifier or a function generator and a spectrum analyzer. Measurements of a resonant structure confirm the feasibility of the concept.
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  • Result 1-3 of 3

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