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- Alavian Ghavanini, Farzan, 1978, et al.
(author)
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Growth characterization of vertically aligned carbon nanofibers on top of TiN buffer layer for nanoelectromechanical devices
- 2010
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In: Procedia Engineering, 24th Eurosensor 24th Conference Linz, AUSTRIA, SEP 05-08, 2010. - : Elsevier BV. - 1877-7058. ; 5, s. 1115-1118
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Conference paper (peer-reviewed)abstract
- Initial growth of vertically aligned carbon nanofibers (VACNFs) from Ni catalyst seeds in the range of 40 to 100 nm as fabricated using hole-mask colloidal lithography on top of reactively sputtered TiN is studied. We observe that the initial growth conditions could cause a growth mode transition from base-type to tip-type. We attribute this transition to a change in the crystallographic orientation of the Ni catalyst seeds induced by initial growth conditions. A convenient method to deposit stoichiometric TiN films is also presented.
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