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1.	Engdahl, E, et al. (author) Human Herpesvirus 6B Induces Hypomethylation on Chromosome 17p13.3, Correlating with Increased Gene Expression and Virus Integration 2017 In: Journal of virology. - 1098-5514. ; 91:11 Journal article (peer-reviewed)
2.	Engdahl, E, et al. (author) The effect of human herpesvirus 6B infection on the MAPK pathway 2018 In: Virus research. - : Elsevier BV. - 1872-7492 .- 0168-1702. ; 256, s. 134-141 Journal article (peer-reviewed)
3.	Wahlbrink, T., et al. (author) Highly selective etch process for silicon-on-insulator nano-devices 2005 In: Microelectronic Engineering. - : Elsevier BV. - 0167-9317 .- 1873-5568. ; 78-79:SI, s. 212-217 Journal article (peer-reviewed)abstract Reactive ion etch (RIE) processes with HBr/O-2 chemistry are optimized for processing of functional nanostructures based on silicon and polysilicon. The etch rate, etch selectivity, anisotropy and sidewall roughness are investigated for specific applications. The potential of this process technology for nanoscale functional devices is demonstrated by MOSFETs with 12 nm gate length and optimized photonic devices with ultrahigh Q-factors.

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Type of publication: journal article (3)

Type of content: peer-reviewed (3)

Author/Editor: Fogdell-Hahn, A (2); Engdahl, E. (2); Niehusmann, P (2); Lemme, Max C., 1970- (1); Efavi, J. K. (1); Almgren, M (1); show more...; Ekstrom, TJ (1); Kurz, H. (1); Gottlob, H. D. B. (1); Dunn, N (1); Wahlbrink, T. (1); Mollenhauer, T. (1); Wideman, S (1); Wipfler, P (1); Becker, AJ (1); Henschel, W (1); Georgiev, Y M (1); Niehusmann, J. (1); Bolivar, P. H. (1); show less...

University: Karolinska Institutet (2); Royal Institute of Technology (1)

Language: English (3)

Research subject (UKÄ/SCB): Engineering and Technology (1)

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