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- Stenman, Anders, et al.
(author)
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Comparison of Global Nonlinear Models and "Model-on-Demand" Estimation Applied to Identification of a RTP Wafer Reactor
- 1999
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In: Preceedings of the 38th IEEE Conference on Decision and Control. - Linköping : Linköping University Electronic Press. - 0780352505 ; , s. 3950-3955 vol.4
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Conference paper (peer-reviewed)abstract
- "Model on Demand" (MoD) simulation of the temperature dynamics in a simulated Rapid Thermal Process-ing (RTP) reactor is compared against various types of global models (ARX, semiphysical, combined semiphysical with neural net). The identication data is generated from a m-level pseudo-random sequence input whose parameters are specied systematically using a priori information readily available to the engineer. The MoD estimator outperforms the ARX model and two semi-physical models, while matching the performance of a combined semi-physical with neural net model. This makes MoD estimation an appealing alternative to global methods because of its reduced engineering eort and simplified a priori knowledge regarding model structure.
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