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Semiconductors and semimetals Vol. 63 Chemical mechanical polishing in silicon processing / volume editors Shin Hwa Li, Robert O. Miller.
- Willardson, Robert K. (editor)
- Beer, Albert C. (editor)
- Li, Shin Hwa (contributor)
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- Miller, Robert O. (contributor)
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- ISBN 0127521720
- New York : Academic Press, Cop. 2000
- English xv, 307 s.
- swepub:Mat__t
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Subject headings
- Halvledare
Keyword
- Pci Elektronik
- Uccdb Fysik Elektronik
- Pci Elektronik
- Uccdb Elektronik
Publication and Content Type
- 537.622 (DDC)
- QC 611
- Pci (kssb/6)
- Uccdb (kssb/6)
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