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Semiconductor measurement technology Results of the Monte Carlo calculation of one- and two-dimensional distributions of particles and damage: ion implanted dopants in silicon / John Albers.
- Albers, John (contributor)
- Washington, 1987
- English 667 s.
- swepub:Mat__t
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- 537.622 028 7 (DDC)
- Uccd (kssb/8 (machine generated))
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