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Semiconductor measurement technology Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 / J.C. Marshall and R.L. Mattis.
- Marshall, J. C. (contributor)
- Mattis, Richard L. (contributor)
- Washington, 1992
- English iv, 140 s.
- Series: NIST special publication, 99-0824194-X ; 400:90
- swepub:Mat__t
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- Halvledare: elektroteknik
Publication and Content Type
- 621.315.592(021) (UDK)
- 53.08(021) (UDK)
- 537.622 028 7 (DDC)
- Uccd (kssb/8 (machine generated))
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