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Semiconductor measurement technology Evolution of silicon materials characterization : lessons learned for improved manufacturing /W. Murray Bullis.
- BookEnglish1993
Publisher, publication year, extent ...
- Washington,1993
- iv, 27 s., s. 201-211ill., diagr., tab.
Numbers
- LIBRIS-ID:99813
Supplementary language notes
- Language:English
Classification
- UDK:621.315.592(021)
- UDK:53.08(021)
- DDC:537.622 028 7
- Uccdkssb/8 (machine generated)
Series
- NIST special publication,99-0824194-X ;400:9240092
Subject headings and genre
Added entries (persons, corporate bodies, meetings, titles ...)
- Bullis, W. Murray (contributor)
- Evolution of silicon materials characterization
Related titles
- Part of/supplement to:Semiconductor measurement technologyWashington, 1974-National Bureau of Standards special publication ; 400:1-
fullvy:Serie_bilook_t
- NIST special publication,99-0824194-X ;400:9240092
Local library classifications, notes and subject headings
- L621.315.592(021)
- L53.08(021)
- LHalvledare: elektroteknik
- LMätteknik
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