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Semiconductor measurement technology Evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis.
- Bullis, W. Murray (contributor)
- Washington, 1993
- English iv, 27 s., s. 201-211
- Series: NIST special publication, 99-0824194-X ; 400:92
- swepub:Mat__t
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- Halvledare: elektroteknik
Publication and Content Type
- 621.315.592(021) (UDK)
- 53.08(021) (UDK)
- 537.622 028 7 (DDC)
- Uccd (kssb/8 (machine generated))
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