Towards New Interferometer Technology for Surface Metrology

• There is an increasing requirement from manufacturing industries for improved technologies to measure surface topography. New instruments have to be accurate; robust to be used on the industry floor; non-invasive; automatic; and sufficiently fast to be used in real time as well as to simultaneously measure over a large area. The industrial applications are plenty:On-line quality control of machined parts,Direct feed back to the manufacturing process,Analysis and selection of surface texture/structure.This paper presents new developments in interferometer techniques for new robust area-based topographic instruments.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Maskinteknik -- Tribologi (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Mechanical Engineering -- Tribology (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Nanoteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Nano-technology (hsv//eng)

Keyword

interferometry

surface metrology

Publication and Content Type

ref (subject category)

kon (subject category)