Surface topography characterization using 3D stereoscopic reconstruction of SEM images

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Maskinteknik -- Tribologi (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Mechanical Engineering -- Tribology (hsv//eng)

Keyword

Scanning Electron Microscope

Coherence Scanning Interferometer

Stereoscopic Reconstruction

Power Spectral Density

Areal Surface Texture Parameters

Publication and Content Type

ref (subject category)

kon (subject category)