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A method for in-sit...
A method for in-situ electrical measurements of thin film heterostructures using TEM and SEM
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- Börjesson, J. (author)
- Chalmers University of Technology, Gothenburg
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- Kalabukhov, A. (author)
- Chalmers University of Technology, Gothenburg
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- Svensson, Krister, 1969- (author)
- Karlstads universitet,Avdelningen för fysik och elektroteknik,Materialfysik
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- Olsson, E. (author)
- Chalmers University of Technology, Gothenburg
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(creator_code:org_t)
- Berlin, Heidelberg : Springer, 2008
- 2008
- English.
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In: EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany 2008. - Berlin, Heidelberg : Springer. - 9783540852254 - 9783540852261 ; , s. 297-298
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- A method for in-situ measurements of electrical properties of thin film heterostructures using TEM and SEM has been developed. This method allows measurements of the conductance in a thin film heterostructure in a direction along the film planes in thin TEM foils. The advantage is that the properties can be directly correlated to the local atomic structure. The specimens are cross section TEM samples prepared with standard grinding, polishing and ion beam milling techniques
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- In-situ TEM
- In-situ SEM
- STM
- Physics
- Fysik
Publication and Content Type
- ref (subject category)
- kon (subject category)
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