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Low temperature activation of B implantation of Si subcell fabrication in III-V/Si tandem solar cells
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- Chuan Chen, Max (author)
- KTH
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- Omanakuttan, Giriprasanth (author)
- KTH
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- Hansson, Rickard, 1987- (author)
- Karlstads universitet,Institutionen för ingenjörsvetenskap och fysik (from 2013),Department of Engineering and Physics, Karlstad University
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- (creator_code:org_t)
- WIP, 2019
- 2019
- English.
- In: Proceedings of the 36<sup>th</sup> EU PVSEC 2019. - : WIP. - 3936338604 ; , s. 764-768
- Conference paper (other academic/artistic)
Abstract
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- In this work, we investigated the Si pre-amorphization implantation (PAI) assisted low temperatureannealing process to activate boron implantation in n-Si in a hydride vapor phase epitaxy (HVPE) reactor, which canbe used for the Si subcell fabrication in the III-V/Si tandem solar cells enabled by the corrugated epitaxial lateralovergrowth (CELOG). A uniform boron activation in Si and a low emitter sheet resistance of 77 /sq was obtained atannealing temperatures of 600-700°C. High-resolution x-ray diffraction was used to study the recrystallization ofamorphous silicon and the incorporation of boron dopants in Si. Hall measurements revealed p-type carrierconcentrations in the order of 1020 cm-3. The n-Si wafers with B implantation activated at 700°C by HVPE wereprocessed to solar cells and characterized by the standard light-current-voltage measurement under AM1.5 spectrumand external quantum efficiency measurements. The developed B implantation and low temperature activationprocesses are applied to the InP/Si seed template preparation for CELOG, on which CELOG GaInP over a Si subcellwith a direct heterojunction was demonstrated.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- Multijunction Solar Cell
- III-V semiconductors
- Annealing
- Amorphous Silicon
- Physics
- Fysik
Publication and Content Type
- vet (subject category)
- kon (subject category)
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