Search: onr:"swepub:oai:DiVA.org:kth-101977" >
High aspect ratio e...
High aspect ratio etching and characterization of 2D-photonic crystals in InP/InGaAsP/InP heterostructures
-
- Anand, Srinivasan (author)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
- Qiu, Min (author)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
- Mulot, Mikael (author)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
show more...
-
- Swillo, Marcin (author)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
- Jaskorzynska, Bozena (author)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
- Karlsson, Anders (author)
- KTH,Mikroelektronik och informationsteknik, IMIT
-
show less...
-
(creator_code:org_t)
- SPIE - International Society for Optical Engineering, 2004
- 2004
- English.
-
In: Photonics. - : SPIE - International Society for Optical Engineering. - 0819451703 ; , s. 78-89
- Related links:
-
https://urn.kb.se/re...
-
show more...
-
https://doi.org/10.1...
-
show less...
Abstract
Subject headings
Close
- We report on the fabrication and characterization of 2D photonic crystals (PhCs) in InP/InGaAsP/InP heterostructures. It is demonstrated that Ar/C12 based chemically assisted ion beam etching (CAIBE) is a very promising method to obtain high aspect ratio etching of PhCs in the InP-based materials. With this process, it is possible to obtain PC-holes as deep as 3 microns even for feature (PhC-hole) sizes as small as 200-250 nm. The optical characteristics of the fabricated PhC-based elements/devices such as line-defect waveguides, in-plane resonant cavities and drop-filter based on contra-directional coupling will be reported. The devices were measured using end-fire coupling and the obtained results were simulated using the 2D finite difference time domain (FDTD) method including an effective loss-approximation. The etched PhC-waveguides show low transmission losses, less than 1 dB/100 mum. A quality factor of 400 for a 6 micron long cavity with 6-hole mirrors is obtained. Finally, drop-functionality in a PhC-based filter using contra-directional coupling is demonstrated.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- photonic crystals
- photonic crystal waveguides
- optical cavities
- optical filters
- drop filters
- InP
- chemically assisted ion beam etching
- reactive ion beam etching
Publication and Content Type
- ref (subject category)
- kon (subject category)
Find in a library
-
Photonics
(Search for host publication in LIBRIS)
To the university's database