Search: onr:"swepub:oai:DiVA.org:kth-104251" >
Characterization of...
Characterization of Ni(Si,Ge) films on epitaxial SiGe(100) formed by microwave annealing
-
- Hu, Cheng (author)
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, Kina
-
- Xu, Peng (author)
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, Kina
-
- Fu, Chaochao (author)
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, Kina
-
show more...
-
- Zhu, Zhiwei (author)
- Uppsala universitet,Fasta tillståndets elektronik
-
- Gao, Xindong (author)
- Uppsala universitet,Fasta tillståndets elektronik
-
- Jamshidi, Asghar (author)
- KTH,Skolan för informations- och kommunikationsteknik (ICT),Shool of Information and Communication Technology, Royal Institute of Technology, Kista
-
- Noroozi, Mohammad (author)
- KTH,Skolan för informations- och kommunikationsteknik (ICT),School of Information and Communication, Royal Institute of Technology, Kista
-
- Radamson, Henry (author)
- KTH,Integrerade komponenter och kretsar,School of Information and Communication technology, Royal Institute of Technology, Kista
-
- Wu, Dongping (author)
- State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, Kina
-
- Zhang, Shi-Li (author)
- Uppsala universitet,Fasta tillståndets elektronik
-
show less...
-
(creator_code:org_t)
- AIP Publishing, 2012
- 2012
- English.
-
In: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 101:9, s. 092101-
- Related links:
-
https://urn.kb.se/re...
-
show more...
-
https://doi.org/10.1...
-
https://urn.kb.se/re...
-
show less...
Abstract
Subject headings
Close
- Microwave annealing (MWA) is investigated as an alternative technique to rapid thermal processing with halogen lamp heating (RTP) for low-temperature silicide formation on epitaxially grown Si0.81Ge0.19 layers. Phase formation, resistivity mapping, morphology analysis, and composition evaluation indicate that the formation of low-resistivity NiSi1-xGex by means of MWA occurs at temperatures about 100 degrees C lower than by RTP. Under similar annealing conditions, more severe strain relaxation and defect generation are therefore found in the remaining Si0.81Ge0.19 layers treated by MWA. Although silicidation by microwave heating is in essence also due to thermal effects, details in heating mechanisms differ from RTP.
Subject headings
- NATURVETENSKAP -- Fysik -- Annan fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Other Physics Topics (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Strained Silicon
- Temperature
- Si1-Xgex
- Si
- Transistors
- Technology
- Defects
- Layers
- Nisi2
- Electronics
- Engineering Science with specialization in Electronics
Publication and Content Type
- ref (subject category)
- art (subject category)
Find in a library
To the university's database
- By the author/editor
-
Hu, Cheng
-
Xu, Peng
-
Fu, Chaochao
-
Zhu, Zhiwei
-
Gao, Xindong
-
Jamshidi, Asghar
-
show more...
-
Noroozi, Mohamma ...
-
Radamson, Henry
-
Wu, Dongping
-
Zhang, Shi-Li
-
show less...
- About the subject
-
- NATURAL SCIENCES
-
NATURAL SCIENCES
-
and Physical Science ...
-
and Other Physics To ...
-
- ENGINEERING AND TECHNOLOGY
-
ENGINEERING AND ...
-
and Electrical Engin ...
- Articles in the publication
-
Applied Physics ...
- By the university
-
Royal Institute of Technology
-
Uppsala University